5/2/2012	12:23:48 AM	Run finished at 12:23 AM
5/2/2012	1:25:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	1:25:30 AM	Recipe started at 1:25 AM
5/2/2012	1:25:30 AM	Helium valve closed
5/2/2012	1:25:30 AM	H2 valve closed
5/2/2012	1:25:30 AM	BCl3 valve closed
5/2/2012	1:25:30 AM	PH3 valve closed
5/2/2012	1:25:30 AM	SiCl4 pre valve closed
5/2/2012	1:25:30 AM	SiCl4 post valve closed
5/2/2012	1:25:30 AM	Main Vac valve closed
5/2/2012	1:25:30 AM	Bypass valve closed
5/2/2012	1:25:30 AM	Bubbler valve closed
5/2/2012	1:25:30 AM	Helium MFC set to  0.000000
5/2/2012	1:25:30 AM	H2 MFC set to  0.000000
5/2/2012	1:25:30 AM	BCl3 MFC set to  0.000000
5/2/2012	1:25:30 AM	PH3 MFC set to  0.000000
5/2/2012	1:25:30 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:25:30 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:25:30 AM	Tube furnace set to 0
5/2/2012	1:25:33 AM	H2 valve closed
5/2/2012	1:25:33 AM	BCl3 valve closed
5/2/2012	1:25:33 AM	PH3 valve closed
5/2/2012	1:25:33 AM	SiCl4 pre valve closed
5/2/2012	1:25:33 AM	SiCl4 post valve closed
5/2/2012	1:25:33 AM	Main Vac valve closed
5/2/2012	1:25:33 AM	Bypass valve closed
5/2/2012	1:25:33 AM	Bubbler valve closed
5/2/2012	1:25:33 AM	Helium valve opened
5/2/2012	1:25:33 AM	Helium MFC set to  500.000000
5/2/2012	1:25:33 AM	H2 MFC set to  0.000000
5/2/2012	1:25:33 AM	BCl3 MFC set to  0.000000
5/2/2012	1:25:33 AM	PH3 MFC set to  0.000000
5/2/2012	1:25:33 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:25:33 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:25:33 AM	Tube furnace set to 0
5/2/2012	1:26:43 AM	Helium valve closed
5/2/2012	1:26:43 AM	H2 valve closed
5/2/2012	1:26:43 AM	BCl3 valve closed
5/2/2012	1:26:43 AM	PH3 valve closed
5/2/2012	1:26:43 AM	SiCl4 pre valve closed
5/2/2012	1:26:43 AM	SiCl4 post valve closed
5/2/2012	1:26:43 AM	Main Vac valve closed
5/2/2012	1:26:43 AM	Bypass valve closed
5/2/2012	1:26:43 AM	Bubbler valve closed
5/2/2012	1:26:43 AM	Helium MFC set to  0.000000
5/2/2012	1:26:43 AM	H2 MFC set to  0.000000
5/2/2012	1:26:43 AM	BCl3 MFC set to  0.000000
5/2/2012	1:26:43 AM	PH3 MFC set to  0.000000
5/2/2012	1:26:43 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:26:43 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:26:43 AM	Tube furnace set to 0
5/2/2012	1:26:44 AM	Run finished at 1:26 AM
5/2/2012	1:26:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	1:30:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	1:31:00 AM	Recipe started at 1:31 AM
5/2/2012	1:31:00 AM	Helium valve closed
5/2/2012	1:31:00 AM	H2 valve closed
5/2/2012	1:31:00 AM	BCl3 valve closed
5/2/2012	1:31:00 AM	PH3 valve closed
5/2/2012	1:31:00 AM	SiCl4 pre valve closed
5/2/2012	1:31:00 AM	SiCl4 post valve closed
5/2/2012	1:31:00 AM	Main Vac valve closed
5/2/2012	1:31:00 AM	Bubbler valve closed
5/2/2012	1:31:00 AM	Bypass valve opened
5/2/2012	1:31:00 AM	Helium MFC set to  0.000000
5/2/2012	1:31:00 AM	H2 MFC set to  0.000000
5/2/2012	1:31:00 AM	BCl3 MFC set to  0.000000
5/2/2012	1:31:00 AM	PH3 MFC set to  0.000000
5/2/2012	1:31:00 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:31:00 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:31:00 AM	Tube furnace set to 0
5/2/2012	1:32:07 AM	Helium valve closed
5/2/2012	1:32:07 AM	H2 valve closed
5/2/2012	1:32:07 AM	BCl3 valve closed
5/2/2012	1:32:07 AM	PH3 valve closed
5/2/2012	1:32:07 AM	SiCl4 pre valve closed
5/2/2012	1:32:07 AM	SiCl4 post valve closed
5/2/2012	1:32:07 AM	Main Vac valve closed
5/2/2012	1:32:07 AM	Bubbler valve closed
5/2/2012	1:32:07 AM	Bypass valve opened
5/2/2012	1:32:07 AM	Helium MFC set to  0.000000
5/2/2012	1:32:07 AM	H2 MFC set to  0.000000
5/2/2012	1:32:07 AM	BCl3 MFC set to  0.000000
5/2/2012	1:32:07 AM	PH3 MFC set to  0.000000
5/2/2012	1:32:07 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:32:07 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:32:07 AM	Tube furnace set to 0
5/2/2012	1:33:08 AM	Helium valve closed
5/2/2012	1:33:08 AM	H2 valve closed
5/2/2012	1:33:08 AM	BCl3 valve closed
5/2/2012	1:33:08 AM	PH3 valve closed
5/2/2012	1:33:08 AM	SiCl4 pre valve closed
5/2/2012	1:33:08 AM	SiCl4 post valve closed
5/2/2012	1:33:08 AM	Bypass valve closed
5/2/2012	1:33:08 AM	Bubbler valve closed
5/2/2012	1:33:08 AM	Main Vac valve opened
5/2/2012	1:33:08 AM	Helium MFC set to  0.000000
5/2/2012	1:33:08 AM	H2 MFC set to  0.000000
5/2/2012	1:33:08 AM	BCl3 MFC set to  0.000000
5/2/2012	1:33:08 AM	PH3 MFC set to  0.000000
5/2/2012	1:33:08 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:33:08 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:33:08 AM	Tube furnace set to 0
5/2/2012	1:33:09 AM	Run finished at 1:33 AM
5/2/2012	1:33:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	1:39:30 AM	Recipe started at 1:39 AM
5/2/2012	1:39:30 AM	Helium valve closed
5/2/2012	1:39:30 AM	H2 valve closed
5/2/2012	1:39:30 AM	BCl3 valve closed
5/2/2012	1:39:30 AM	PH3 valve closed
5/2/2012	1:39:30 AM	SiCl4 pre valve closed
5/2/2012	1:39:30 AM	SiCl4 post valve closed
5/2/2012	1:39:30 AM	Bypass valve closed
5/2/2012	1:39:30 AM	Bubbler valve closed
5/2/2012	1:39:30 AM	Main Vac valve opened
5/2/2012	1:39:30 AM	Helium MFC set to  0.000000
5/2/2012	1:39:30 AM	H2 MFC set to  0.000000
5/2/2012	1:39:30 AM	BCl3 MFC set to  0.000000
5/2/2012	1:39:30 AM	PH3 MFC set to  0.000000
5/2/2012	1:39:30 AM	SiCl4 MFC set to  0.000000
5/2/2012	1:39:30 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:39:30 AM	Tube furnace set to 150
5/2/2012	4:39:30 AM	Helium valve closed
5/2/2012	4:39:30 AM	H2 valve closed
5/2/2012	4:39:30 AM	BCl3 valve closed
5/2/2012	4:39:30 AM	PH3 valve closed
5/2/2012	4:39:30 AM	SiCl4 pre valve closed
5/2/2012	4:39:30 AM	SiCl4 post valve closed
5/2/2012	4:39:30 AM	Main Vac valve closed
5/2/2012	4:39:30 AM	Bypass valve closed
5/2/2012	4:39:30 AM	Bubbler valve closed
5/2/2012	4:39:30 AM	Helium MFC set to  0.000000
5/2/2012	4:39:30 AM	H2 MFC set to  0.000000
5/2/2012	4:39:30 AM	BCl3 MFC set to  0.000000
5/2/2012	4:39:30 AM	PH3 MFC set to  0.000000
5/2/2012	4:39:30 AM	SiCl4 MFC set to  0.000000
5/2/2012	4:39:30 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:39:31 AM	Tube furnace set to 0
5/2/2012	4:39:34 AM	Helium valve closed
5/2/2012	4:39:34 AM	BCl3 valve closed
5/2/2012	4:39:34 AM	PH3 valve closed
5/2/2012	4:39:34 AM	SiCl4 pre valve closed
5/2/2012	4:39:34 AM	SiCl4 post valve closed
5/2/2012	4:39:34 AM	Main Vac valve closed
5/2/2012	4:39:34 AM	Bypass valve closed
5/2/2012	4:39:34 AM	Bubbler valve closed
5/2/2012	4:39:34 AM	H2 valve opened
5/2/2012	4:39:34 AM	Helium MFC set to  0.000000
5/2/2012	4:39:34 AM	H2 MFC set to  500.000000
5/2/2012	4:39:34 AM	BCl3 MFC set to  0.000000
5/2/2012	4:39:34 AM	PH3 MFC set to  0.000000
5/2/2012	4:39:34 AM	SiCl4 MFC set to  0.000000
5/2/2012	4:39:34 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:39:34 AM	Tube furnace set to 150
5/2/2012	4:40:46 AM	Helium valve closed
5/2/2012	4:40:46 AM	BCl3 valve closed
5/2/2012	4:40:46 AM	PH3 valve closed
5/2/2012	4:40:46 AM	SiCl4 pre valve closed
5/2/2012	4:40:46 AM	SiCl4 post valve closed
5/2/2012	4:40:46 AM	Main Vac valve closed
5/2/2012	4:40:46 AM	Bypass valve closed
5/2/2012	4:40:46 AM	H2 valve opened
5/2/2012	4:40:46 AM	Bubbler valve opened
5/2/2012	4:40:46 AM	Helium MFC set to  0.000000
5/2/2012	4:40:46 AM	H2 MFC set to  500.000000
5/2/2012	4:40:46 AM	BCl3 MFC set to  0.000000
5/2/2012	4:40:46 AM	PH3 MFC set to  0.000000
5/2/2012	4:40:46 AM	SiCl4 MFC set to  0.000000
5/2/2012	4:40:46 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:40:46 AM	Tube furnace set to 1000
5/2/2012	4:40:47 AM	Helium valve closed
5/2/2012	4:40:47 AM	BCl3 valve closed
5/2/2012	4:40:47 AM	PH3 valve closed
5/2/2012	4:40:47 AM	SiCl4 pre valve closed
5/2/2012	4:40:47 AM	SiCl4 post valve closed
5/2/2012	4:40:48 AM	Main Vac valve closed
5/2/2012	4:40:48 AM	Bypass valve closed
5/2/2012	4:40:48 AM	H2 valve opened
5/2/2012	4:40:48 AM	Bubbler valve opened
5/2/2012	4:40:48 AM	Helium MFC set to  0.000000
5/2/2012	4:40:48 AM	H2 MFC set to  500.000000
5/2/2012	4:40:48 AM	BCl3 MFC set to  0.000000
5/2/2012	4:40:48 AM	PH3 MFC set to  0.000000
5/2/2012	4:40:48 AM	SiCl4 MFC set to  0.000000
5/2/2012	4:40:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:40:48 AM	Tube furnace set to 1000
5/2/2012	5:05:48 AM	Helium valve closed
5/2/2012	5:05:48 AM	BCl3 valve closed
5/2/2012	5:05:48 AM	Main Vac valve closed
5/2/2012	5:05:48 AM	Bypass valve closed
5/2/2012	5:05:48 AM	H2 valve opened
5/2/2012	5:05:48 AM	PH3 valve opened
5/2/2012	5:05:48 AM	SiCl4 pre valve opened
5/2/2012	5:05:48 AM	SiCl4 post valve opened
5/2/2012	5:05:48 AM	Bubbler valve opened
5/2/2012	5:05:48 AM	Helium MFC set to  0.000000
5/2/2012	5:05:48 AM	H2 MFC set to  450.000000
5/2/2012	5:05:48 AM	BCl3 MFC set to  0.000000
5/2/2012	5:05:48 AM	PH3 MFC set to  20.000000
5/2/2012	5:05:48 AM	SiCl4 MFC set to  50.000000
5/2/2012	5:05:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:05:48 AM	Tube furnace set to 1000
5/2/2012	5:30:48 AM	Helium valve closed
5/2/2012	5:30:48 AM	BCl3 valve closed
5/2/2012	5:30:48 AM	PH3 valve closed
5/2/2012	5:30:48 AM	SiCl4 pre valve closed
5/2/2012	5:30:48 AM	SiCl4 post valve closed
5/2/2012	5:30:48 AM	Main Vac valve closed
5/2/2012	5:30:48 AM	Bypass valve closed
5/2/2012	5:30:48 AM	H2 valve opened
5/2/2012	5:30:48 AM	Bubbler valve opened
5/2/2012	5:30:48 AM	Helium MFC set to  0.000000
5/2/2012	5:30:48 AM	H2 MFC set to  500.000000
5/2/2012	5:30:48 AM	BCl3 MFC set to  0.000000
5/2/2012	5:30:48 AM	PH3 MFC set to  0.000000
5/2/2012	5:30:48 AM	SiCl4 MFC set to  0.000000
5/2/2012	5:30:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:30:48 AM	Tube furnace set to 100
5/2/2012	5:45:48 AM	H2 valve closed
5/2/2012	5:45:48 AM	BCl3 valve closed
5/2/2012	5:45:48 AM	PH3 valve closed
5/2/2012	5:45:48 AM	SiCl4 pre valve closed
5/2/2012	5:45:48 AM	SiCl4 post valve closed
5/2/2012	5:45:48 AM	Main Vac valve closed
5/2/2012	5:45:48 AM	Bypass valve closed
5/2/2012	5:45:48 AM	Helium valve opened
5/2/2012	5:45:48 AM	Bubbler valve opened
5/2/2012	5:45:48 AM	Helium MFC set to  500.000000
5/2/2012	5:45:48 AM	H2 MFC set to  0.000000
5/2/2012	5:45:48 AM	BCl3 MFC set to  0.000000
5/2/2012	5:45:48 AM	PH3 MFC set to  0.000000
5/2/2012	5:45:48 AM	SiCl4 MFC set to  0.000000
5/2/2012	5:45:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:45:48 AM	Tube furnace set to 100
5/2/2012	6:05:48 AM	Helium valve closed
5/2/2012	6:05:48 AM	H2 valve closed
5/2/2012	6:05:48 AM	BCl3 valve closed
5/2/2012	6:05:48 AM	PH3 valve closed
5/2/2012	6:05:48 AM	SiCl4 pre valve closed
5/2/2012	6:05:48 AM	SiCl4 post valve closed
5/2/2012	6:05:48 AM	Main Vac valve closed
5/2/2012	6:05:48 AM	Bypass valve closed
5/2/2012	6:05:48 AM	Bubbler valve closed
5/2/2012	6:05:48 AM	Helium MFC set to  0.000000
5/2/2012	6:05:48 AM	H2 MFC set to  0.000000
5/2/2012	6:05:48 AM	BCl3 MFC set to  0.000000
5/2/2012	6:05:48 AM	PH3 MFC set to  0.000000
5/2/2012	6:05:48 AM	SiCl4 MFC set to  0.000000
5/2/2012	6:05:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:05:48 AM	Tube furnace set to 100
5/2/2012	6:25:48 AM	Helium valve closed
5/2/2012	6:25:48 AM	H2 valve closed
5/2/2012	6:25:48 AM	BCl3 valve closed
5/2/2012	6:25:48 AM	PH3 valve closed
5/2/2012	6:25:48 AM	SiCl4 pre valve closed
5/2/2012	6:25:48 AM	SiCl4 post valve closed
5/2/2012	6:25:48 AM	Main Vac valve closed
5/2/2012	6:25:48 AM	Bubbler valve closed
5/2/2012	6:25:48 AM	Bypass valve opened
5/2/2012	6:25:48 AM	Helium MFC set to  0.000000
5/2/2012	6:25:48 AM	H2 MFC set to  0.000000
5/2/2012	6:25:48 AM	BCl3 MFC set to  0.000000
5/2/2012	6:25:48 AM	PH3 MFC set to  0.000000
5/2/2012	6:25:48 AM	SiCl4 MFC set to  0.000000
5/2/2012	6:25:48 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:25:49 AM	Tube furnace set to 100
5/2/2012	6:26:39 AM	Helium valve closed
5/2/2012	6:26:39 AM	H2 valve closed
5/2/2012	6:26:39 AM	BCl3 valve closed
5/2/2012	6:26:39 AM	PH3 valve closed
5/2/2012	6:26:39 AM	SiCl4 pre valve closed
5/2/2012	6:26:39 AM	SiCl4 post valve closed
5/2/2012	6:26:39 AM	Main Vac valve closed
5/2/2012	6:26:39 AM	Bubbler valve closed
5/2/2012	6:26:39 AM	Bypass valve opened
5/2/2012	6:26:39 AM	Helium MFC set to  0.000000
5/2/2012	6:26:39 AM	H2 MFC set to  0.000000
5/2/2012	6:26:39 AM	BCl3 MFC set to  0.000000
5/2/2012	6:26:39 AM	PH3 MFC set to  0.000000
5/2/2012	6:26:39 AM	SiCl4 MFC set to  0.000000
5/2/2012	6:26:39 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:26:40 AM	Tube furnace set to 100
5/2/2012	6:27:40 AM	Helium valve closed
5/2/2012	6:27:40 AM	H2 valve closed
5/2/2012	6:27:40 AM	BCl3 valve closed
5/2/2012	6:27:40 AM	PH3 valve closed
5/2/2012	6:27:40 AM	SiCl4 pre valve closed
5/2/2012	6:27:40 AM	SiCl4 post valve closed
5/2/2012	6:27:40 AM	Bypass valve closed
5/2/2012	6:27:40 AM	Bubbler valve closed
5/2/2012	6:27:40 AM	Main Vac valve opened
5/2/2012	6:27:40 AM	Helium MFC set to  0.000000
5/2/2012	6:27:40 AM	H2 MFC set to  0.000000
5/2/2012	6:27:40 AM	BCl3 MFC set to  0.000000
5/2/2012	6:27:40 AM	PH3 MFC set to  0.000000
5/2/2012	6:27:40 AM	SiCl4 MFC set to  0.000000
5/2/2012	6:27:40 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:27:40 AM	Tube furnace set to 100
5/2/2012	7:27:40 AM	Run finished at 7:27 AM
5/2/2012	10:12:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	10:12:49 AM	Recipe started at 10:12 AM
5/2/2012	10:12:49 AM	Helium valve closed
5/2/2012	10:12:49 AM	H2 valve closed
5/2/2012	10:12:49 AM	BCl3 valve closed
5/2/2012	10:12:49 AM	PH3 valve closed
5/2/2012	10:12:49 AM	SiCl4 pre valve closed
5/2/2012	10:12:49 AM	SiCl4 post valve closed
5/2/2012	10:12:49 AM	Main Vac valve closed
5/2/2012	10:12:49 AM	Bypass valve closed
5/2/2012	10:12:49 AM	Bubbler valve closed
5/2/2012	10:12:49 AM	Helium MFC set to  0.000000
5/2/2012	10:12:49 AM	H2 MFC set to  0.000000
5/2/2012	10:12:49 AM	BCl3 MFC set to  0.000000
5/2/2012	10:12:49 AM	PH3 MFC set to  0.000000
5/2/2012	10:12:49 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:12:49 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:12:49 AM	Tube furnace set to 0
5/2/2012	10:12:52 AM	H2 valve closed
5/2/2012	10:12:52 AM	BCl3 valve closed
5/2/2012	10:12:52 AM	PH3 valve closed
5/2/2012	10:12:52 AM	SiCl4 pre valve closed
5/2/2012	10:12:52 AM	SiCl4 post valve closed
5/2/2012	10:12:52 AM	Main Vac valve closed
5/2/2012	10:12:52 AM	Bypass valve closed
5/2/2012	10:12:52 AM	Bubbler valve closed
5/2/2012	10:12:52 AM	Helium valve opened
5/2/2012	10:12:52 AM	Helium MFC set to  500.000000
5/2/2012	10:12:52 AM	H2 MFC set to  0.000000
5/2/2012	10:12:52 AM	BCl3 MFC set to  0.000000
5/2/2012	10:12:52 AM	PH3 MFC set to  0.000000
5/2/2012	10:12:52 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:12:52 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:12:52 AM	Tube furnace set to 0
5/2/2012	10:14:02 AM	Helium valve closed
5/2/2012	10:14:02 AM	H2 valve closed
5/2/2012	10:14:02 AM	BCl3 valve closed
5/2/2012	10:14:02 AM	PH3 valve closed
5/2/2012	10:14:02 AM	SiCl4 pre valve closed
5/2/2012	10:14:02 AM	SiCl4 post valve closed
5/2/2012	10:14:02 AM	Main Vac valve closed
5/2/2012	10:14:02 AM	Bypass valve closed
5/2/2012	10:14:02 AM	Bubbler valve closed
5/2/2012	10:14:02 AM	Helium MFC set to  0.000000
5/2/2012	10:14:02 AM	H2 MFC set to  0.000000
5/2/2012	10:14:02 AM	BCl3 MFC set to  0.000000
5/2/2012	10:14:02 AM	PH3 MFC set to  0.000000
5/2/2012	10:14:02 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:14:02 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:14:03 AM	Tube furnace set to 0
5/2/2012	10:14:04 AM	Run finished at 10:14 AM
5/2/2012	10:14:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	10:25:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	10:25:41 AM	Recipe started at 10:25 AM
5/2/2012	10:25:41 AM	Helium valve closed
5/2/2012	10:25:41 AM	H2 valve closed
5/2/2012	10:25:41 AM	BCl3 valve closed
5/2/2012	10:25:41 AM	PH3 valve closed
5/2/2012	10:25:41 AM	SiCl4 pre valve closed
5/2/2012	10:25:41 AM	SiCl4 post valve closed
5/2/2012	10:25:41 AM	Main Vac valve closed
5/2/2012	10:25:41 AM	Bubbler valve closed
5/2/2012	10:25:41 AM	Bypass valve opened
5/2/2012	10:25:41 AM	Helium MFC set to  0.000000
5/2/2012	10:25:41 AM	H2 MFC set to  0.000000
5/2/2012	10:25:41 AM	BCl3 MFC set to  0.000000
5/2/2012	10:25:41 AM	PH3 MFC set to  0.000000
5/2/2012	10:25:41 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:25:41 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:25:41 AM	Tube furnace set to 0
5/2/2012	10:26:57 AM	Helium valve closed
5/2/2012	10:26:57 AM	H2 valve closed
5/2/2012	10:26:57 AM	BCl3 valve closed
5/2/2012	10:26:57 AM	PH3 valve closed
5/2/2012	10:26:57 AM	SiCl4 pre valve closed
5/2/2012	10:26:57 AM	SiCl4 post valve closed
5/2/2012	10:26:57 AM	Main Vac valve closed
5/2/2012	10:26:57 AM	Bubbler valve closed
5/2/2012	10:26:57 AM	Bypass valve opened
5/2/2012	10:26:57 AM	Helium MFC set to  0.000000
5/2/2012	10:26:57 AM	H2 MFC set to  0.000000
5/2/2012	10:26:57 AM	BCl3 MFC set to  0.000000
5/2/2012	10:26:57 AM	PH3 MFC set to  0.000000
5/2/2012	10:26:57 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:26:57 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:26:57 AM	Tube furnace set to 0
5/2/2012	10:27:57 AM	Helium valve closed
5/2/2012	10:27:57 AM	H2 valve closed
5/2/2012	10:27:57 AM	BCl3 valve closed
5/2/2012	10:27:57 AM	PH3 valve closed
5/2/2012	10:27:57 AM	SiCl4 pre valve closed
5/2/2012	10:27:57 AM	SiCl4 post valve closed
5/2/2012	10:27:57 AM	Bypass valve closed
5/2/2012	10:27:57 AM	Bubbler valve closed
5/2/2012	10:27:57 AM	Main Vac valve opened
5/2/2012	10:27:57 AM	Helium MFC set to  0.000000
5/2/2012	10:27:57 AM	H2 MFC set to  0.000000
5/2/2012	10:27:57 AM	BCl3 MFC set to  0.000000
5/2/2012	10:27:57 AM	PH3 MFC set to  0.000000
5/2/2012	10:27:57 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:27:57 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:27:57 AM	Tube furnace set to 0
5/2/2012	10:27:58 AM	Run finished at 10:27 AM
5/2/2012	10:27:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	10:44:01 AM	Recipe started at 10:43 AM
5/2/2012	10:44:01 AM	H2 valve closed
5/2/2012	10:44:01 AM	BCl3 valve closed
5/2/2012	10:44:01 AM	PH3 valve closed
5/2/2012	10:44:01 AM	SiCl4 pre valve closed
5/2/2012	10:44:01 AM	SiCl4 post valve closed
5/2/2012	10:44:01 AM	Main Vac valve closed
5/2/2012	10:44:01 AM	Bypass valve closed
5/2/2012	10:44:01 AM	Bubbler valve closed
5/2/2012	10:44:01 AM	Helium valve opened
5/2/2012	10:44:01 AM	Helium MFC set to  500.000000
5/2/2012	10:44:01 AM	H2 MFC set to  0.000000
5/2/2012	10:44:01 AM	BCl3 MFC set to  0.000000
5/2/2012	10:44:01 AM	PH3 MFC set to  0.000000
5/2/2012	10:44:01 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:44:01 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:44:01 AM	Tube furnace set to 180
5/2/2012	10:45:17 AM	H2 valve closed
5/2/2012	10:45:17 AM	BCl3 valve closed
5/2/2012	10:45:17 AM	PH3 valve closed
5/2/2012	10:45:17 AM	SiCl4 pre valve closed
5/2/2012	10:45:17 AM	SiCl4 post valve closed
5/2/2012	10:45:17 AM	Main Vac valve closed
5/2/2012	10:45:17 AM	Bypass valve closed
5/2/2012	10:45:17 AM	Helium valve opened
5/2/2012	10:45:17 AM	Bubbler valve opened
5/2/2012	10:45:17 AM	Helium MFC set to  500.000000
5/2/2012	10:45:17 AM	H2 MFC set to  0.000000
5/2/2012	10:45:17 AM	BCl3 MFC set to  0.000000
5/2/2012	10:45:17 AM	PH3 MFC set to  0.000000
5/2/2012	10:45:17 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:45:17 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:45:17 AM	Tube furnace set to 180
5/2/2012	10:46:17 AM	Helium valve closed
5/2/2012	10:46:17 AM	H2 valve closed
5/2/2012	10:46:17 AM	BCl3 valve closed
5/2/2012	10:46:17 AM	PH3 valve closed
5/2/2012	10:46:17 AM	SiCl4 pre valve closed
5/2/2012	10:46:17 AM	SiCl4 post valve closed
5/2/2012	10:46:17 AM	Main Vac valve closed
5/2/2012	10:46:17 AM	Bubbler valve closed
5/2/2012	10:46:17 AM	Bypass valve opened
5/2/2012	10:46:17 AM	Helium MFC set to  0.000000
5/2/2012	10:46:17 AM	H2 MFC set to  0.000000
5/2/2012	10:46:17 AM	BCl3 MFC set to  0.000000
5/2/2012	10:46:17 AM	PH3 MFC set to  0.000000
5/2/2012	10:46:17 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:46:17 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:46:17 AM	Tube furnace set to 180
5/2/2012	10:47:13 AM	Helium valve closed
5/2/2012	10:47:13 AM	H2 valve closed
5/2/2012	10:47:13 AM	BCl3 valve closed
5/2/2012	10:47:13 AM	PH3 valve closed
5/2/2012	10:47:13 AM	SiCl4 pre valve closed
5/2/2012	10:47:13 AM	SiCl4 post valve closed
5/2/2012	10:47:13 AM	Main Vac valve closed
5/2/2012	10:47:13 AM	Bubbler valve closed
5/2/2012	10:47:13 AM	Bypass valve opened
5/2/2012	10:47:13 AM	Helium MFC set to  0.000000
5/2/2012	10:47:13 AM	H2 MFC set to  0.000000
5/2/2012	10:47:13 AM	BCl3 MFC set to  0.000000
5/2/2012	10:47:13 AM	PH3 MFC set to  0.000000
5/2/2012	10:47:13 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:47:13 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:47:13 AM	Tube furnace set to 180
5/2/2012	10:48:13 AM	Helium valve closed
5/2/2012	10:48:13 AM	H2 valve closed
5/2/2012	10:48:13 AM	BCl3 valve closed
5/2/2012	10:48:13 AM	PH3 valve closed
5/2/2012	10:48:13 AM	SiCl4 pre valve closed
5/2/2012	10:48:13 AM	SiCl4 post valve closed
5/2/2012	10:48:13 AM	Bypass valve closed
5/2/2012	10:48:13 AM	Bubbler valve closed
5/2/2012	10:48:13 AM	Main Vac valve opened
5/2/2012	10:48:13 AM	Helium MFC set to  0.000000
5/2/2012	10:48:13 AM	H2 MFC set to  0.000000
5/2/2012	10:48:13 AM	BCl3 MFC set to  0.000000
5/2/2012	10:48:13 AM	PH3 MFC set to  0.000000
5/2/2012	10:48:13 AM	SiCl4 MFC set to  0.000000
5/2/2012	10:48:13 AM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:48:13 AM	Tube furnace set to 180
5/2/2012	12:18:13 PM	H2 valve closed
5/2/2012	12:18:13 PM	BCl3 valve closed
5/2/2012	12:18:13 PM	PH3 valve closed
5/2/2012	12:18:13 PM	SiCl4 pre valve closed
5/2/2012	12:18:13 PM	SiCl4 post valve closed
5/2/2012	12:18:13 PM	Bypass valve closed
5/2/2012	12:18:13 PM	Bubbler valve closed
5/2/2012	12:18:13 PM	Helium valve opened
5/2/2012	12:18:13 PM	Main Vac valve opened
5/2/2012	12:18:13 PM	Helium MFC set to  10.000000
5/2/2012	12:18:13 PM	H2 MFC set to  0.000000
5/2/2012	12:18:13 PM	BCl3 MFC set to  0.000000
5/2/2012	12:18:13 PM	PH3 MFC set to  0.000000
5/2/2012	12:18:13 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:18:13 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:18:13 PM	Tube furnace set to 180
5/2/2012	12:18:43 PM	Helium valve closed
5/2/2012	12:18:43 PM	H2 valve closed
5/2/2012	12:18:43 PM	BCl3 valve closed
5/2/2012	12:18:44 PM	PH3 valve closed
5/2/2012	12:18:44 PM	SiCl4 pre valve closed
5/2/2012	12:18:44 PM	SiCl4 post valve closed
5/2/2012	12:18:44 PM	Bypass valve closed
5/2/2012	12:18:44 PM	Bubbler valve closed
5/2/2012	12:18:44 PM	Main Vac valve opened
5/2/2012	12:18:44 PM	Helium MFC set to  0.000000
5/2/2012	12:18:44 PM	H2 MFC set to  0.000000
5/2/2012	12:18:44 PM	BCl3 MFC set to  0.000000
5/2/2012	12:18:44 PM	PH3 MFC set to  0.000000
5/2/2012	12:18:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:18:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:18:44 PM	Tube furnace set to 180
5/2/2012	12:19:14 PM	H2 valve closed
5/2/2012	12:19:14 PM	BCl3 valve closed
5/2/2012	12:19:14 PM	PH3 valve closed
5/2/2012	12:19:14 PM	SiCl4 pre valve closed
5/2/2012	12:19:14 PM	SiCl4 post valve closed
5/2/2012	12:19:14 PM	Bypass valve closed
5/2/2012	12:19:14 PM	Bubbler valve closed
5/2/2012	12:19:14 PM	Helium valve opened
5/2/2012	12:19:14 PM	Main Vac valve opened
5/2/2012	12:19:14 PM	Helium MFC set to  10.000000
5/2/2012	12:19:14 PM	H2 MFC set to  0.000000
5/2/2012	12:19:14 PM	BCl3 MFC set to  0.000000
5/2/2012	12:19:14 PM	PH3 MFC set to  0.000000
5/2/2012	12:19:14 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:19:14 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:19:14 PM	Tube furnace set to 180
5/2/2012	12:19:44 PM	Helium valve closed
5/2/2012	12:19:44 PM	H2 valve closed
5/2/2012	12:19:44 PM	BCl3 valve closed
5/2/2012	12:19:44 PM	PH3 valve closed
5/2/2012	12:19:44 PM	SiCl4 pre valve closed
5/2/2012	12:19:44 PM	SiCl4 post valve closed
5/2/2012	12:19:44 PM	Bypass valve closed
5/2/2012	12:19:44 PM	Bubbler valve closed
5/2/2012	12:19:44 PM	Main Vac valve opened
5/2/2012	12:19:44 PM	Helium MFC set to  0.000000
5/2/2012	12:19:44 PM	H2 MFC set to  0.000000
5/2/2012	12:19:44 PM	BCl3 MFC set to  0.000000
5/2/2012	12:19:44 PM	PH3 MFC set to  0.000000
5/2/2012	12:19:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:19:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:19:44 PM	Tube furnace set to 180
5/2/2012	12:21:44 PM	Helium valve closed
5/2/2012	12:21:44 PM	BCl3 valve closed
5/2/2012	12:21:44 PM	PH3 valve closed
5/2/2012	12:21:44 PM	SiCl4 pre valve closed
5/2/2012	12:21:44 PM	SiCl4 post valve closed
5/2/2012	12:21:44 PM	Main Vac valve closed
5/2/2012	12:21:44 PM	Bypass valve closed
5/2/2012	12:21:44 PM	Bubbler valve closed
5/2/2012	12:21:44 PM	H2 valve opened
5/2/2012	12:21:44 PM	Helium MFC set to  0.000000
5/2/2012	12:21:44 PM	H2 MFC set to  500.000000
5/2/2012	12:21:44 PM	BCl3 MFC set to  0.000000
5/2/2012	12:21:44 PM	PH3 MFC set to  0.000000
5/2/2012	12:21:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:21:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:21:44 PM	Tube furnace set to 1000
5/2/2012	12:22:56 PM	Helium valve closed
5/2/2012	12:22:56 PM	BCl3 valve closed
5/2/2012	12:22:56 PM	PH3 valve closed
5/2/2012	12:22:56 PM	SiCl4 pre valve closed
5/2/2012	12:22:56 PM	SiCl4 post valve closed
5/2/2012	12:22:56 PM	Main Vac valve closed
5/2/2012	12:22:56 PM	Bypass valve closed
5/2/2012	12:22:56 PM	H2 valve opened
5/2/2012	12:22:56 PM	Bubbler valve opened
5/2/2012	12:22:56 PM	Helium MFC set to  0.000000
5/2/2012	12:22:56 PM	H2 MFC set to  500.000000
5/2/2012	12:22:56 PM	BCl3 MFC set to  0.000000
5/2/2012	12:22:56 PM	PH3 MFC set to  0.000000
5/2/2012	12:22:56 PM	SiCl4 MFC set to  0.000000
5/2/2012	12:22:56 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:22:56 PM	Tube furnace set to 1000
5/2/2012	12:47:56 PM	Helium valve closed
5/2/2012	12:47:56 PM	PH3 valve closed
5/2/2012	12:47:56 PM	Main Vac valve closed
5/2/2012	12:47:56 PM	Bypass valve closed
5/2/2012	12:47:56 PM	H2 valve opened
5/2/2012	12:47:56 PM	BCl3 valve opened
5/2/2012	12:47:56 PM	SiCl4 pre valve opened
5/2/2012	12:47:56 PM	SiCl4 post valve opened
5/2/2012	12:47:56 PM	Bubbler valve opened
5/2/2012	12:47:56 PM	Helium MFC set to  0.000000
5/2/2012	12:47:56 PM	H2 MFC set to  450.000000
5/2/2012	12:47:56 PM	BCl3 MFC set to  1.000000
5/2/2012	12:47:56 PM	PH3 MFC set to  0.000000
5/2/2012	12:47:56 PM	SiCl4 MFC set to  50.000000
5/2/2012	12:47:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	12:47:57 PM	Tube furnace set to 1000
5/2/2012	1:11:57 PM	Helium valve closed
5/2/2012	1:11:57 PM	PH3 valve closed
5/2/2012	1:11:57 PM	Main Vac valve closed
5/2/2012	1:11:57 PM	Bypass valve closed
5/2/2012	1:11:57 PM	H2 valve opened
5/2/2012	1:11:57 PM	BCl3 valve opened
5/2/2012	1:11:57 PM	SiCl4 pre valve opened
5/2/2012	1:11:57 PM	SiCl4 post valve opened
5/2/2012	1:11:57 PM	Bubbler valve opened
5/2/2012	1:11:57 PM	Helium MFC set to  0.000000
5/2/2012	1:11:57 PM	H2 MFC set to  450.000000
5/2/2012	1:11:57 PM	BCl3 MFC set to  20.000000
5/2/2012	1:11:57 PM	PH3 MFC set to  0.000000
5/2/2012	1:11:57 PM	SiCl4 MFC set to  50.000000
5/2/2012	1:11:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:11:57 PM	Tube furnace set to 1000
5/2/2012	1:12:57 PM	Helium valve closed
5/2/2012	1:12:57 PM	BCl3 valve closed
5/2/2012	1:12:57 PM	PH3 valve closed
5/2/2012	1:12:57 PM	SiCl4 pre valve closed
5/2/2012	1:12:57 PM	SiCl4 post valve closed
5/2/2012	1:12:57 PM	Main Vac valve closed
5/2/2012	1:12:57 PM	Bypass valve closed
5/2/2012	1:12:57 PM	H2 valve opened
5/2/2012	1:12:57 PM	Bubbler valve opened
5/2/2012	1:12:57 PM	Helium MFC set to  0.000000
5/2/2012	1:12:57 PM	H2 MFC set to  500.000000
5/2/2012	1:12:57 PM	BCl3 MFC set to  0.000000
5/2/2012	1:12:57 PM	PH3 MFC set to  0.000000
5/2/2012	1:12:57 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:12:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:12:57 PM	Tube furnace set to 975
5/2/2012	1:14:27 PM	Helium valve closed
5/2/2012	1:14:27 PM	BCl3 valve closed
5/2/2012	1:14:27 PM	PH3 valve closed
5/2/2012	1:14:27 PM	SiCl4 pre valve closed
5/2/2012	1:14:27 PM	SiCl4 post valve closed
5/2/2012	1:14:27 PM	Main Vac valve closed
5/2/2012	1:14:27 PM	Bypass valve closed
5/2/2012	1:14:27 PM	H2 valve opened
5/2/2012	1:14:27 PM	Bubbler valve opened
5/2/2012	1:14:27 PM	Helium MFC set to  0.000000
5/2/2012	1:14:27 PM	H2 MFC set to  500.000000
5/2/2012	1:14:27 PM	BCl3 MFC set to  0.000000
5/2/2012	1:14:27 PM	PH3 MFC set to  0.000000
5/2/2012	1:14:27 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:14:27 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:14:27 PM	Tube furnace set to 950
5/2/2012	1:15:57 PM	Helium valve closed
5/2/2012	1:15:57 PM	BCl3 valve closed
5/2/2012	1:15:57 PM	PH3 valve closed
5/2/2012	1:15:57 PM	SiCl4 pre valve closed
5/2/2012	1:15:57 PM	SiCl4 post valve closed
5/2/2012	1:15:57 PM	Main Vac valve closed
5/2/2012	1:15:57 PM	Bypass valve closed
5/2/2012	1:15:57 PM	H2 valve opened
5/2/2012	1:15:57 PM	Bubbler valve opened
5/2/2012	1:15:57 PM	Helium MFC set to  0.000000
5/2/2012	1:15:57 PM	H2 MFC set to  500.000000
5/2/2012	1:15:57 PM	BCl3 MFC set to  0.000000
5/2/2012	1:15:57 PM	PH3 MFC set to  0.000000
5/2/2012	1:15:57 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:15:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:15:58 PM	Tube furnace set to 925
5/2/2012	1:17:28 PM	Helium valve closed
5/2/2012	1:17:28 PM	BCl3 valve closed
5/2/2012	1:17:28 PM	PH3 valve closed
5/2/2012	1:17:28 PM	SiCl4 pre valve closed
5/2/2012	1:17:28 PM	SiCl4 post valve closed
5/2/2012	1:17:28 PM	Main Vac valve closed
5/2/2012	1:17:28 PM	Bypass valve closed
5/2/2012	1:17:28 PM	H2 valve opened
5/2/2012	1:17:28 PM	Bubbler valve opened
5/2/2012	1:17:28 PM	Helium MFC set to  0.000000
5/2/2012	1:17:28 PM	H2 MFC set to  500.000000
5/2/2012	1:17:28 PM	BCl3 MFC set to  0.000000
5/2/2012	1:17:28 PM	PH3 MFC set to  0.000000
5/2/2012	1:17:28 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:17:28 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:17:28 PM	Tube furnace set to 900
5/2/2012	1:18:58 PM	H2 valve closed
5/2/2012	1:18:58 PM	BCl3 valve closed
5/2/2012	1:18:58 PM	PH3 valve closed
5/2/2012	1:18:58 PM	SiCl4 pre valve closed
5/2/2012	1:18:58 PM	SiCl4 post valve closed
5/2/2012	1:18:58 PM	Main Vac valve closed
5/2/2012	1:18:58 PM	Bypass valve closed
5/2/2012	1:18:58 PM	Helium valve opened
5/2/2012	1:18:58 PM	Bubbler valve opened
5/2/2012	1:18:58 PM	Helium MFC set to  500.000000
5/2/2012	1:18:58 PM	H2 MFC set to  0.000000
5/2/2012	1:18:58 PM	BCl3 MFC set to  0.000000
5/2/2012	1:18:58 PM	PH3 MFC set to  0.000000
5/2/2012	1:18:58 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:18:58 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:18:58 PM	Tube furnace set to 875
5/2/2012	1:20:28 PM	H2 valve closed
5/2/2012	1:20:28 PM	BCl3 valve closed
5/2/2012	1:20:28 PM	PH3 valve closed
5/2/2012	1:20:28 PM	SiCl4 pre valve closed
5/2/2012	1:20:28 PM	SiCl4 post valve closed
5/2/2012	1:20:28 PM	Main Vac valve closed
5/2/2012	1:20:28 PM	Bypass valve closed
5/2/2012	1:20:28 PM	Helium valve opened
5/2/2012	1:20:28 PM	Bubbler valve opened
5/2/2012	1:20:28 PM	Helium MFC set to  500.000000
5/2/2012	1:20:28 PM	H2 MFC set to  0.000000
5/2/2012	1:20:28 PM	BCl3 MFC set to  0.000000
5/2/2012	1:20:28 PM	PH3 MFC set to  0.000000
5/2/2012	1:20:28 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:20:28 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:20:28 PM	Tube furnace set to 850
5/2/2012	1:21:58 PM	H2 valve closed
5/2/2012	1:21:58 PM	BCl3 valve closed
5/2/2012	1:21:58 PM	PH3 valve closed
5/2/2012	1:21:58 PM	SiCl4 pre valve closed
5/2/2012	1:21:58 PM	SiCl4 post valve closed
5/2/2012	1:21:58 PM	Main Vac valve closed
5/2/2012	1:21:58 PM	Bypass valve closed
5/2/2012	1:21:58 PM	Helium valve opened
5/2/2012	1:21:58 PM	Bubbler valve opened
5/2/2012	1:21:58 PM	Helium MFC set to  500.000000
5/2/2012	1:21:58 PM	H2 MFC set to  0.000000
5/2/2012	1:21:58 PM	BCl3 MFC set to  0.000000
5/2/2012	1:21:58 PM	PH3 MFC set to  0.000000
5/2/2012	1:21:58 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:21:58 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:21:58 PM	Tube furnace set to 825
5/2/2012	1:23:28 PM	H2 valve closed
5/2/2012	1:23:28 PM	BCl3 valve closed
5/2/2012	1:23:28 PM	PH3 valve closed
5/2/2012	1:23:28 PM	SiCl4 pre valve closed
5/2/2012	1:23:28 PM	SiCl4 post valve closed
5/2/2012	1:23:28 PM	Main Vac valve closed
5/2/2012	1:23:28 PM	Bypass valve closed
5/2/2012	1:23:28 PM	Helium valve opened
5/2/2012	1:23:28 PM	Bubbler valve opened
5/2/2012	1:23:28 PM	Helium MFC set to  500.000000
5/2/2012	1:23:28 PM	H2 MFC set to  0.000000
5/2/2012	1:23:28 PM	BCl3 MFC set to  0.000000
5/2/2012	1:23:28 PM	PH3 MFC set to  0.000000
5/2/2012	1:23:28 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:23:28 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:23:29 PM	Tube furnace set to 800
5/2/2012	1:24:59 PM	H2 valve closed
5/2/2012	1:24:59 PM	BCl3 valve closed
5/2/2012	1:24:59 PM	PH3 valve closed
5/2/2012	1:24:59 PM	SiCl4 pre valve closed
5/2/2012	1:24:59 PM	SiCl4 post valve closed
5/2/2012	1:24:59 PM	Main Vac valve closed
5/2/2012	1:24:59 PM	Bypass valve closed
5/2/2012	1:24:59 PM	Helium valve opened
5/2/2012	1:24:59 PM	Bubbler valve opened
5/2/2012	1:24:59 PM	Helium MFC set to  500.000000
5/2/2012	1:24:59 PM	H2 MFC set to  0.000000
5/2/2012	1:24:59 PM	BCl3 MFC set to  0.000000
5/2/2012	1:24:59 PM	PH3 MFC set to  0.000000
5/2/2012	1:24:59 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:24:59 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:24:59 PM	Tube furnace set to 0
5/2/2012	1:39:59 PM	Helium valve closed
5/2/2012	1:39:59 PM	H2 valve closed
5/2/2012	1:39:59 PM	BCl3 valve closed
5/2/2012	1:39:59 PM	PH3 valve closed
5/2/2012	1:39:59 PM	SiCl4 pre valve closed
5/2/2012	1:39:59 PM	SiCl4 post valve closed
5/2/2012	1:39:59 PM	Main Vac valve closed
5/2/2012	1:39:59 PM	Bypass valve closed
5/2/2012	1:39:59 PM	Bubbler valve closed
5/2/2012	1:39:59 PM	Helium MFC set to  0.000000
5/2/2012	1:39:59 PM	H2 MFC set to  0.000000
5/2/2012	1:39:59 PM	BCl3 MFC set to  0.000000
5/2/2012	1:39:59 PM	PH3 MFC set to  0.000000
5/2/2012	1:39:59 PM	SiCl4 MFC set to  0.000000
5/2/2012	1:39:59 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	1:39:59 PM	Tube furnace set to 0
5/2/2012	2:02:43 PM	Run aborted at 2:02 PM
5/2/2012	2:02:43 PM	Helium valve closed
5/2/2012	2:02:43 PM	H2 valve closed
5/2/2012	2:02:43 PM	BCl3 valve closed
5/2/2012	2:02:43 PM	PH3 valve closed
5/2/2012	2:02:43 PM	SiCl4 pre valve closed
5/2/2012	2:02:43 PM	SiCl4 post valve closed
5/2/2012	2:02:43 PM	Bypass valve closed
5/2/2012	2:02:43 PM	Main Vac valve closed
5/2/2012	2:02:43 PM	Bubbler valve closed
5/2/2012	2:02:43 PM	Helium MFC set to  0.000000
5/2/2012	2:02:43 PM	H2 MFC set to  0.000000
5/2/2012	2:02:43 PM	BCl3 MFC set to  0.000000
5/2/2012	2:02:43 PM	PH3 MFC set to  0.000000
5/2/2012	2:02:43 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:02:43 PM	Tube furnace set to 0
5/2/2012	2:03:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	2:03:25 PM	Recipe started at 2:03 PM
5/2/2012	2:03:25 PM	Helium valve closed
5/2/2012	2:03:25 PM	H2 valve closed
5/2/2012	2:03:25 PM	BCl3 valve closed
5/2/2012	2:03:25 PM	PH3 valve closed
5/2/2012	2:03:25 PM	SiCl4 pre valve closed
5/2/2012	2:03:25 PM	SiCl4 post valve closed
5/2/2012	2:03:25 PM	Main Vac valve closed
5/2/2012	2:03:25 PM	Bubbler valve closed
5/2/2012	2:03:25 PM	Bypass valve opened
5/2/2012	2:03:25 PM	Helium MFC set to  0.000000
5/2/2012	2:03:25 PM	H2 MFC set to  0.000000
5/2/2012	2:03:25 PM	BCl3 MFC set to  0.000000
5/2/2012	2:03:25 PM	PH3 MFC set to  0.000000
5/2/2012	2:03:25 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:03:25 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:03:25 PM	Tube furnace set to 0
5/2/2012	2:04:21 PM	Helium valve closed
5/2/2012	2:04:21 PM	H2 valve closed
5/2/2012	2:04:21 PM	BCl3 valve closed
5/2/2012	2:04:21 PM	PH3 valve closed
5/2/2012	2:04:21 PM	SiCl4 pre valve closed
5/2/2012	2:04:21 PM	SiCl4 post valve closed
5/2/2012	2:04:21 PM	Main Vac valve closed
5/2/2012	2:04:21 PM	Bubbler valve closed
5/2/2012	2:04:21 PM	Bypass valve opened
5/2/2012	2:04:21 PM	Helium MFC set to  0.000000
5/2/2012	2:04:21 PM	H2 MFC set to  0.000000
5/2/2012	2:04:21 PM	BCl3 MFC set to  0.000000
5/2/2012	2:04:21 PM	PH3 MFC set to  0.000000
5/2/2012	2:04:21 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:04:21 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:04:21 PM	Tube furnace set to 0
5/2/2012	2:05:21 PM	Helium valve closed
5/2/2012	2:05:21 PM	H2 valve closed
5/2/2012	2:05:21 PM	BCl3 valve closed
5/2/2012	2:05:21 PM	PH3 valve closed
5/2/2012	2:05:21 PM	SiCl4 pre valve closed
5/2/2012	2:05:21 PM	SiCl4 post valve closed
5/2/2012	2:05:21 PM	Bypass valve closed
5/2/2012	2:05:21 PM	Bubbler valve closed
5/2/2012	2:05:21 PM	Main Vac valve opened
5/2/2012	2:05:21 PM	Helium MFC set to  0.000000
5/2/2012	2:05:21 PM	H2 MFC set to  0.000000
5/2/2012	2:05:21 PM	BCl3 MFC set to  0.000000
5/2/2012	2:05:21 PM	PH3 MFC set to  0.000000
5/2/2012	2:05:21 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:05:21 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:05:21 PM	Tube furnace set to 0
5/2/2012	2:05:22 PM	Run finished at 2:05 PM
5/2/2012	2:05:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	2:05:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	2:05:54 PM	Recipe started at 2:05 PM
5/2/2012	2:05:54 PM	Helium valve closed
5/2/2012	2:05:54 PM	H2 valve closed
5/2/2012	2:05:54 PM	BCl3 valve closed
5/2/2012	2:05:54 PM	PH3 valve closed
5/2/2012	2:05:54 PM	SiCl4 pre valve closed
5/2/2012	2:05:54 PM	SiCl4 post valve closed
5/2/2012	2:05:54 PM	Main Vac valve closed
5/2/2012	2:05:54 PM	Bypass valve closed
5/2/2012	2:05:54 PM	Bubbler valve closed
5/2/2012	2:05:54 PM	Helium MFC set to  0.000000
5/2/2012	2:05:54 PM	H2 MFC set to  0.000000
5/2/2012	2:05:54 PM	BCl3 MFC set to  0.000000
5/2/2012	2:05:54 PM	PH3 MFC set to  0.000000
5/2/2012	2:05:54 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:05:54 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:05:54 PM	Tube furnace set to 0
5/2/2012	2:05:57 PM	H2 valve closed
5/2/2012	2:05:57 PM	BCl3 valve closed
5/2/2012	2:05:57 PM	PH3 valve closed
5/2/2012	2:05:57 PM	SiCl4 pre valve closed
5/2/2012	2:05:57 PM	SiCl4 post valve closed
5/2/2012	2:05:57 PM	Main Vac valve closed
5/2/2012	2:05:57 PM	Bypass valve closed
5/2/2012	2:05:57 PM	Bubbler valve closed
5/2/2012	2:05:57 PM	Helium valve opened
5/2/2012	2:05:57 PM	Helium MFC set to  500.000000
5/2/2012	2:05:57 PM	H2 MFC set to  0.000000
5/2/2012	2:05:57 PM	BCl3 MFC set to  0.000000
5/2/2012	2:05:57 PM	PH3 MFC set to  0.000000
5/2/2012	2:05:57 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:05:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:05:57 PM	Tube furnace set to 0
5/2/2012	2:07:09 PM	Helium valve closed
5/2/2012	2:07:09 PM	H2 valve closed
5/2/2012	2:07:09 PM	BCl3 valve closed
5/2/2012	2:07:09 PM	PH3 valve closed
5/2/2012	2:07:09 PM	SiCl4 pre valve closed
5/2/2012	2:07:09 PM	SiCl4 post valve closed
5/2/2012	2:07:09 PM	Main Vac valve closed
5/2/2012	2:07:09 PM	Bypass valve closed
5/2/2012	2:07:09 PM	Bubbler valve closed
5/2/2012	2:07:09 PM	Helium MFC set to  0.000000
5/2/2012	2:07:09 PM	H2 MFC set to  0.000000
5/2/2012	2:07:09 PM	BCl3 MFC set to  0.000000
5/2/2012	2:07:09 PM	PH3 MFC set to  0.000000
5/2/2012	2:07:09 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:07:09 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:07:09 PM	Tube furnace set to 0
5/2/2012	2:07:10 PM	Run finished at 2:07 PM
5/2/2012	2:07:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	2:21:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	2:21:33 PM	Recipe started at 2:21 PM
5/2/2012	2:21:33 PM	Helium valve closed
5/2/2012	2:21:33 PM	H2 valve closed
5/2/2012	2:21:33 PM	BCl3 valve closed
5/2/2012	2:21:33 PM	PH3 valve closed
5/2/2012	2:21:33 PM	SiCl4 pre valve closed
5/2/2012	2:21:33 PM	SiCl4 post valve closed
5/2/2012	2:21:33 PM	Main Vac valve closed
5/2/2012	2:21:33 PM	Bubbler valve closed
5/2/2012	2:21:33 PM	Bypass valve opened
5/2/2012	2:21:33 PM	Helium MFC set to  0.000000
5/2/2012	2:21:33 PM	H2 MFC set to  0.000000
5/2/2012	2:21:33 PM	BCl3 MFC set to  0.000000
5/2/2012	2:21:33 PM	PH3 MFC set to  0.000000
5/2/2012	2:21:33 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:21:33 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:21:34 PM	Tube furnace set to 0
5/2/2012	2:22:47 PM	Helium valve closed
5/2/2012	2:22:47 PM	H2 valve closed
5/2/2012	2:22:47 PM	BCl3 valve closed
5/2/2012	2:22:47 PM	PH3 valve closed
5/2/2012	2:22:47 PM	SiCl4 pre valve closed
5/2/2012	2:22:47 PM	SiCl4 post valve closed
5/2/2012	2:22:47 PM	Main Vac valve closed
5/2/2012	2:22:47 PM	Bubbler valve closed
5/2/2012	2:22:47 PM	Bypass valve opened
5/2/2012	2:22:47 PM	Helium MFC set to  0.000000
5/2/2012	2:22:47 PM	H2 MFC set to  0.000000
5/2/2012	2:22:47 PM	BCl3 MFC set to  0.000000
5/2/2012	2:22:47 PM	PH3 MFC set to  0.000000
5/2/2012	2:22:47 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:22:47 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:22:48 PM	Tube furnace set to 0
5/2/2012	2:23:48 PM	Helium valve closed
5/2/2012	2:23:48 PM	H2 valve closed
5/2/2012	2:23:48 PM	BCl3 valve closed
5/2/2012	2:23:48 PM	PH3 valve closed
5/2/2012	2:23:48 PM	SiCl4 pre valve closed
5/2/2012	2:23:48 PM	SiCl4 post valve closed
5/2/2012	2:23:48 PM	Bypass valve closed
5/2/2012	2:23:48 PM	Bubbler valve closed
5/2/2012	2:23:48 PM	Main Vac valve opened
5/2/2012	2:23:48 PM	Helium MFC set to  0.000000
5/2/2012	2:23:48 PM	H2 MFC set to  0.000000
5/2/2012	2:23:48 PM	BCl3 MFC set to  0.000000
5/2/2012	2:23:48 PM	PH3 MFC set to  0.000000
5/2/2012	2:23:48 PM	SiCl4 MFC set to  0.000000
5/2/2012	2:23:48 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	2:23:48 PM	Tube furnace set to 0
5/2/2012	2:23:49 PM	Run finished at 2:23 PM
5/2/2012	2:23:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	2:29:57 PM	Main Vac valve closed
5/2/2012	2:30:30 PM	Main Vac valve opened
5/2/2012	4:48:23 PM	Main Vac valve closed
5/2/2012	4:50:08 PM	Main Vac valve opened
5/2/2012	4:52:28 PM	Recipe started at 4:52 PM
5/2/2012	4:52:28 PM	Helium valve closed
5/2/2012	4:52:28 PM	BCl3 valve closed
5/2/2012	4:52:28 PM	PH3 valve closed
5/2/2012	4:52:28 PM	SiCl4 pre valve closed
5/2/2012	4:52:28 PM	SiCl4 post valve closed
5/2/2012	4:52:28 PM	Main Vac valve closed
5/2/2012	4:52:28 PM	Bypass valve closed
5/2/2012	4:52:28 PM	Bubbler valve closed
5/2/2012	4:52:28 PM	H2 valve opened
5/2/2012	4:52:28 PM	Helium MFC set to  0.000000
5/2/2012	4:52:28 PM	H2 MFC set to  500.000000
5/2/2012	4:52:28 PM	BCl3 MFC set to  0.000000
5/2/2012	4:52:28 PM	PH3 MFC set to  0.000000
5/2/2012	4:52:28 PM	SiCl4 MFC set to  0.000000
5/2/2012	4:52:28 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:52:28 PM	Tube furnace set to 1000
5/2/2012	4:53:43 PM	Helium valve closed
5/2/2012	4:53:43 PM	BCl3 valve closed
5/2/2012	4:53:43 PM	PH3 valve closed
5/2/2012	4:53:43 PM	SiCl4 pre valve closed
5/2/2012	4:53:43 PM	SiCl4 post valve closed
5/2/2012	4:53:43 PM	Main Vac valve closed
5/2/2012	4:53:43 PM	Bypass valve closed
5/2/2012	4:53:43 PM	H2 valve opened
5/2/2012	4:53:43 PM	Bubbler valve opened
5/2/2012	4:53:43 PM	Helium MFC set to  0.000000
5/2/2012	4:53:43 PM	H2 MFC set to  500.000000
5/2/2012	4:53:43 PM	BCl3 MFC set to  0.000000
5/2/2012	4:53:43 PM	PH3 MFC set to  0.000000
5/2/2012	4:53:43 PM	SiCl4 MFC set to  0.000000
5/2/2012	4:53:43 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	4:53:43 PM	Tube furnace set to 1000
5/2/2012	5:18:43 PM	Helium valve closed
5/2/2012	5:18:43 PM	PH3 valve closed
5/2/2012	5:18:43 PM	Main Vac valve closed
5/2/2012	5:18:43 PM	Bypass valve closed
5/2/2012	5:18:43 PM	H2 valve opened
5/2/2012	5:18:43 PM	BCl3 valve opened
5/2/2012	5:18:43 PM	SiCl4 pre valve opened
5/2/2012	5:18:43 PM	SiCl4 post valve opened
5/2/2012	5:18:43 PM	Bubbler valve opened
5/2/2012	5:18:43 PM	Helium MFC set to  0.000000
5/2/2012	5:18:43 PM	H2 MFC set to  450.000000
5/2/2012	5:18:43 PM	BCl3 MFC set to  1.000000
5/2/2012	5:18:43 PM	PH3 MFC set to  0.000000
5/2/2012	5:18:43 PM	SiCl4 MFC set to  50.000000
5/2/2012	5:18:43 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:18:43 PM	Tube furnace set to 1000
5/2/2012	5:42:43 PM	Helium valve closed
5/2/2012	5:42:43 PM	PH3 valve closed
5/2/2012	5:42:43 PM	Main Vac valve closed
5/2/2012	5:42:43 PM	Bypass valve closed
5/2/2012	5:42:43 PM	H2 valve opened
5/2/2012	5:42:43 PM	BCl3 valve opened
5/2/2012	5:42:43 PM	SiCl4 pre valve opened
5/2/2012	5:42:43 PM	SiCl4 post valve opened
5/2/2012	5:42:43 PM	Bubbler valve opened
5/2/2012	5:42:43 PM	Helium MFC set to  0.000000
5/2/2012	5:42:43 PM	H2 MFC set to  450.000000
5/2/2012	5:42:43 PM	BCl3 MFC set to  20.000000
5/2/2012	5:42:43 PM	PH3 MFC set to  0.000000
5/2/2012	5:42:43 PM	SiCl4 MFC set to  50.000000
5/2/2012	5:42:43 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:42:43 PM	Tube furnace set to 1000
5/2/2012	5:43:44 PM	Helium valve closed
5/2/2012	5:43:44 PM	BCl3 valve closed
5/2/2012	5:43:44 PM	PH3 valve closed
5/2/2012	5:43:44 PM	SiCl4 pre valve closed
5/2/2012	5:43:44 PM	SiCl4 post valve closed
5/2/2012	5:43:44 PM	Main Vac valve closed
5/2/2012	5:43:44 PM	Bypass valve closed
5/2/2012	5:43:44 PM	H2 valve opened
5/2/2012	5:43:44 PM	Bubbler valve opened
5/2/2012	5:43:44 PM	Helium MFC set to  0.000000
5/2/2012	5:43:44 PM	H2 MFC set to  500.000000
5/2/2012	5:43:44 PM	BCl3 MFC set to  0.000000
5/2/2012	5:43:44 PM	PH3 MFC set to  0.000000
5/2/2012	5:43:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:43:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:43:44 PM	Tube furnace set to 975
5/2/2012	5:45:14 PM	Helium valve closed
5/2/2012	5:45:14 PM	BCl3 valve closed
5/2/2012	5:45:14 PM	PH3 valve closed
5/2/2012	5:45:14 PM	SiCl4 pre valve closed
5/2/2012	5:45:14 PM	SiCl4 post valve closed
5/2/2012	5:45:14 PM	Main Vac valve closed
5/2/2012	5:45:14 PM	Bypass valve closed
5/2/2012	5:45:14 PM	H2 valve opened
5/2/2012	5:45:14 PM	Bubbler valve opened
5/2/2012	5:45:14 PM	Helium MFC set to  0.000000
5/2/2012	5:45:14 PM	H2 MFC set to  500.000000
5/2/2012	5:45:14 PM	BCl3 MFC set to  0.000000
5/2/2012	5:45:14 PM	PH3 MFC set to  0.000000
5/2/2012	5:45:14 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:45:14 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:45:14 PM	Tube furnace set to 950
5/2/2012	5:46:44 PM	Helium valve closed
5/2/2012	5:46:44 PM	BCl3 valve closed
5/2/2012	5:46:44 PM	PH3 valve closed
5/2/2012	5:46:44 PM	SiCl4 pre valve closed
5/2/2012	5:46:44 PM	SiCl4 post valve closed
5/2/2012	5:46:44 PM	Main Vac valve closed
5/2/2012	5:46:44 PM	Bypass valve closed
5/2/2012	5:46:44 PM	H2 valve opened
5/2/2012	5:46:44 PM	Bubbler valve opened
5/2/2012	5:46:44 PM	Helium MFC set to  0.000000
5/2/2012	5:46:44 PM	H2 MFC set to  500.000000
5/2/2012	5:46:44 PM	BCl3 MFC set to  0.000000
5/2/2012	5:46:44 PM	PH3 MFC set to  0.000000
5/2/2012	5:46:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:46:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:46:44 PM	Tube furnace set to 925
5/2/2012	5:48:14 PM	Helium valve closed
5/2/2012	5:48:14 PM	BCl3 valve closed
5/2/2012	5:48:14 PM	PH3 valve closed
5/2/2012	5:48:14 PM	SiCl4 pre valve closed
5/2/2012	5:48:14 PM	SiCl4 post valve closed
5/2/2012	5:48:14 PM	Main Vac valve closed
5/2/2012	5:48:14 PM	Bypass valve closed
5/2/2012	5:48:14 PM	H2 valve opened
5/2/2012	5:48:14 PM	Bubbler valve opened
5/2/2012	5:48:14 PM	Helium MFC set to  0.000000
5/2/2012	5:48:14 PM	H2 MFC set to  500.000000
5/2/2012	5:48:14 PM	BCl3 MFC set to  0.000000
5/2/2012	5:48:14 PM	PH3 MFC set to  0.000000
5/2/2012	5:48:14 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:48:14 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:48:14 PM	Tube furnace set to 900
5/2/2012	5:49:44 PM	H2 valve closed
5/2/2012	5:49:44 PM	BCl3 valve closed
5/2/2012	5:49:44 PM	PH3 valve closed
5/2/2012	5:49:44 PM	SiCl4 pre valve closed
5/2/2012	5:49:44 PM	SiCl4 post valve closed
5/2/2012	5:49:45 PM	Main Vac valve closed
5/2/2012	5:49:45 PM	Bypass valve closed
5/2/2012	5:49:45 PM	Helium valve opened
5/2/2012	5:49:45 PM	Bubbler valve opened
5/2/2012	5:49:45 PM	Helium MFC set to  500.000000
5/2/2012	5:49:45 PM	H2 MFC set to  0.000000
5/2/2012	5:49:45 PM	BCl3 MFC set to  0.000000
5/2/2012	5:49:45 PM	PH3 MFC set to  0.000000
5/2/2012	5:49:45 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:49:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:49:45 PM	Tube furnace set to 875
5/2/2012	5:51:15 PM	H2 valve closed
5/2/2012	5:51:15 PM	BCl3 valve closed
5/2/2012	5:51:15 PM	PH3 valve closed
5/2/2012	5:51:15 PM	SiCl4 pre valve closed
5/2/2012	5:51:15 PM	SiCl4 post valve closed
5/2/2012	5:51:15 PM	Main Vac valve closed
5/2/2012	5:51:15 PM	Bypass valve closed
5/2/2012	5:51:15 PM	Helium valve opened
5/2/2012	5:51:15 PM	Bubbler valve opened
5/2/2012	5:51:15 PM	Helium MFC set to  500.000000
5/2/2012	5:51:15 PM	H2 MFC set to  0.000000
5/2/2012	5:51:15 PM	BCl3 MFC set to  0.000000
5/2/2012	5:51:15 PM	PH3 MFC set to  0.000000
5/2/2012	5:51:15 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:51:15 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:51:15 PM	Tube furnace set to 850
5/2/2012	5:52:45 PM	H2 valve closed
5/2/2012	5:52:45 PM	BCl3 valve closed
5/2/2012	5:52:45 PM	PH3 valve closed
5/2/2012	5:52:45 PM	SiCl4 pre valve closed
5/2/2012	5:52:45 PM	SiCl4 post valve closed
5/2/2012	5:52:45 PM	Main Vac valve closed
5/2/2012	5:52:45 PM	Bypass valve closed
5/2/2012	5:52:45 PM	Helium valve opened
5/2/2012	5:52:45 PM	Bubbler valve opened
5/2/2012	5:52:45 PM	Helium MFC set to  500.000000
5/2/2012	5:52:45 PM	H2 MFC set to  0.000000
5/2/2012	5:52:45 PM	BCl3 MFC set to  0.000000
5/2/2012	5:52:45 PM	PH3 MFC set to  0.000000
5/2/2012	5:52:45 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:52:45 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:52:45 PM	Tube furnace set to 825
5/2/2012	5:54:15 PM	H2 valve closed
5/2/2012	5:54:15 PM	BCl3 valve closed
5/2/2012	5:54:15 PM	PH3 valve closed
5/2/2012	5:54:15 PM	SiCl4 pre valve closed
5/2/2012	5:54:15 PM	SiCl4 post valve closed
5/2/2012	5:54:15 PM	Main Vac valve closed
5/2/2012	5:54:15 PM	Bypass valve closed
5/2/2012	5:54:15 PM	Helium valve opened
5/2/2012	5:54:15 PM	Bubbler valve opened
5/2/2012	5:54:15 PM	Helium MFC set to  500.000000
5/2/2012	5:54:15 PM	H2 MFC set to  0.000000
5/2/2012	5:54:15 PM	BCl3 MFC set to  0.000000
5/2/2012	5:54:15 PM	PH3 MFC set to  0.000000
5/2/2012	5:54:15 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:54:15 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:54:15 PM	Tube furnace set to 800
5/2/2012	5:55:45 PM	H2 valve closed
5/2/2012	5:55:45 PM	BCl3 valve closed
5/2/2012	5:55:45 PM	PH3 valve closed
5/2/2012	5:55:45 PM	SiCl4 pre valve closed
5/2/2012	5:55:45 PM	SiCl4 post valve closed
5/2/2012	5:55:45 PM	Main Vac valve closed
5/2/2012	5:55:45 PM	Bypass valve closed
5/2/2012	5:55:45 PM	Helium valve opened
5/2/2012	5:55:45 PM	Bubbler valve opened
5/2/2012	5:55:45 PM	Helium MFC set to  500.000000
5/2/2012	5:55:45 PM	H2 MFC set to  0.000000
5/2/2012	5:55:45 PM	BCl3 MFC set to  0.000000
5/2/2012	5:55:45 PM	PH3 MFC set to  0.000000
5/2/2012	5:55:46 PM	SiCl4 MFC set to  0.000000
5/2/2012	5:55:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	5:55:46 PM	Tube furnace set to 0
5/2/2012	6:10:46 PM	Helium valve closed
5/2/2012	6:10:46 PM	H2 valve closed
5/2/2012	6:10:46 PM	BCl3 valve closed
5/2/2012	6:10:46 PM	PH3 valve closed
5/2/2012	6:10:46 PM	SiCl4 pre valve closed
5/2/2012	6:10:46 PM	SiCl4 post valve closed
5/2/2012	6:10:46 PM	Main Vac valve closed
5/2/2012	6:10:46 PM	Bypass valve closed
5/2/2012	6:10:46 PM	Bubbler valve closed
5/2/2012	6:10:46 PM	Helium MFC set to  0.000000
5/2/2012	6:10:46 PM	H2 MFC set to  0.000000
5/2/2012	6:10:46 PM	BCl3 MFC set to  0.000000
5/2/2012	6:10:46 PM	PH3 MFC set to  0.000000
5/2/2012	6:10:46 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:10:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:10:46 PM	Tube furnace set to 0
5/2/2012	6:40:46 PM	H2 valve closed
5/2/2012	6:40:46 PM	BCl3 valve closed
5/2/2012	6:40:46 PM	PH3 valve closed
5/2/2012	6:40:46 PM	SiCl4 pre valve closed
5/2/2012	6:40:46 PM	SiCl4 post valve closed
5/2/2012	6:40:46 PM	Main Vac valve closed
5/2/2012	6:40:46 PM	Bypass valve closed
5/2/2012	6:40:46 PM	Bubbler valve closed
5/2/2012	6:40:46 PM	Helium valve opened
5/2/2012	6:40:46 PM	Helium MFC set to  500.000000
5/2/2012	6:40:46 PM	H2 MFC set to  0.000000
5/2/2012	6:40:46 PM	BCl3 MFC set to  0.000000
5/2/2012	6:40:46 PM	PH3 MFC set to  0.000000
5/2/2012	6:40:46 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:40:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:40:46 PM	Tube furnace set to 0
5/2/2012	6:40:50 PM	H2 valve closed
5/2/2012	6:40:50 PM	BCl3 valve closed
5/2/2012	6:40:50 PM	PH3 valve closed
5/2/2012	6:40:50 PM	SiCl4 pre valve closed
5/2/2012	6:40:50 PM	SiCl4 post valve closed
5/2/2012	6:40:50 PM	Main Vac valve closed
5/2/2012	6:40:50 PM	Bypass valve closed
5/2/2012	6:40:50 PM	Helium valve opened
5/2/2012	6:40:50 PM	Bubbler valve opened
5/2/2012	6:40:50 PM	Helium MFC set to  500.000000
5/2/2012	6:40:50 PM	H2 MFC set to  0.000000
5/2/2012	6:40:50 PM	BCl3 MFC set to  0.000000
5/2/2012	6:40:50 PM	PH3 MFC set to  0.000000
5/2/2012	6:40:50 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:40:50 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:40:50 PM	Tube furnace set to 0
5/2/2012	6:42:50 PM	Helium valve closed
5/2/2012	6:42:50 PM	H2 valve closed
5/2/2012	6:42:50 PM	BCl3 valve closed
5/2/2012	6:42:50 PM	PH3 valve closed
5/2/2012	6:42:50 PM	SiCl4 pre valve closed
5/2/2012	6:42:50 PM	SiCl4 post valve closed
5/2/2012	6:42:50 PM	Main Vac valve closed
5/2/2012	6:42:50 PM	Bypass valve closed
5/2/2012	6:42:50 PM	Bubbler valve closed
5/2/2012	6:42:50 PM	Helium MFC set to  0.000000
5/2/2012	6:42:50 PM	H2 MFC set to  0.000000
5/2/2012	6:42:50 PM	BCl3 MFC set to  0.000000
5/2/2012	6:42:50 PM	PH3 MFC set to  0.000000
5/2/2012	6:42:50 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:42:50 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:42:50 PM	Tube furnace set to 0
5/2/2012	6:42:52 PM	Helium valve closed
5/2/2012	6:42:52 PM	H2 valve closed
5/2/2012	6:42:52 PM	BCl3 valve closed
5/2/2012	6:42:52 PM	PH3 valve closed
5/2/2012	6:42:52 PM	SiCl4 pre valve closed
5/2/2012	6:42:52 PM	SiCl4 post valve closed
5/2/2012	6:42:52 PM	Main Vac valve closed
5/2/2012	6:42:52 PM	Bubbler valve closed
5/2/2012	6:42:52 PM	Bypass valve opened
5/2/2012	6:42:52 PM	Helium MFC set to  0.000000
5/2/2012	6:42:52 PM	H2 MFC set to  0.000000
5/2/2012	6:42:52 PM	BCl3 MFC set to  0.000000
5/2/2012	6:42:52 PM	PH3 MFC set to  0.000000
5/2/2012	6:42:52 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:42:52 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:42:52 PM	Tube furnace set to 0
5/2/2012	6:43:43 PM	Helium valve closed
5/2/2012	6:43:43 PM	H2 valve closed
5/2/2012	6:43:44 PM	BCl3 valve closed
5/2/2012	6:43:44 PM	PH3 valve closed
5/2/2012	6:43:44 PM	SiCl4 pre valve closed
5/2/2012	6:43:44 PM	SiCl4 post valve closed
5/2/2012	6:43:44 PM	Main Vac valve closed
5/2/2012	6:43:44 PM	Bubbler valve closed
5/2/2012	6:43:44 PM	Bypass valve opened
5/2/2012	6:43:44 PM	Helium MFC set to  0.000000
5/2/2012	6:43:44 PM	H2 MFC set to  0.000000
5/2/2012	6:43:44 PM	BCl3 MFC set to  0.000000
5/2/2012	6:43:44 PM	PH3 MFC set to  0.000000
5/2/2012	6:43:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:43:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:43:44 PM	Tube furnace set to 0
5/2/2012	6:44:44 PM	Helium valve closed
5/2/2012	6:44:44 PM	H2 valve closed
5/2/2012	6:44:44 PM	BCl3 valve closed
5/2/2012	6:44:44 PM	PH3 valve closed
5/2/2012	6:44:44 PM	SiCl4 pre valve closed
5/2/2012	6:44:44 PM	SiCl4 post valve closed
5/2/2012	6:44:44 PM	Bypass valve closed
5/2/2012	6:44:44 PM	Bubbler valve closed
5/2/2012	6:44:44 PM	Main Vac valve opened
5/2/2012	6:44:44 PM	Helium MFC set to  0.000000
5/2/2012	6:44:44 PM	H2 MFC set to  0.000000
5/2/2012	6:44:44 PM	BCl3 MFC set to  0.000000
5/2/2012	6:44:44 PM	PH3 MFC set to  0.000000
5/2/2012	6:44:44 PM	SiCl4 MFC set to  0.000000
5/2/2012	6:44:44 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	6:44:44 PM	Tube furnace set to 0
5/2/2012	9:24:44 PM	Run finished at 9:24 PM
5/2/2012	9:41:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	9:41:19 PM	Recipe started at 9:41 PM
5/2/2012	9:41:19 PM	Helium valve closed
5/2/2012	9:41:19 PM	H2 valve closed
5/2/2012	9:41:19 PM	BCl3 valve closed
5/2/2012	9:41:19 PM	PH3 valve closed
5/2/2012	9:41:19 PM	SiCl4 pre valve closed
5/2/2012	9:41:19 PM	SiCl4 post valve closed
5/2/2012	9:41:19 PM	Main Vac valve closed
5/2/2012	9:41:19 PM	Bypass valve closed
5/2/2012	9:41:19 PM	Bubbler valve closed
5/2/2012	9:41:19 PM	Helium MFC set to  0.000000
5/2/2012	9:41:19 PM	H2 MFC set to  0.000000
5/2/2012	9:41:19 PM	BCl3 MFC set to  0.000000
5/2/2012	9:41:19 PM	PH3 MFC set to  0.000000
5/2/2012	9:41:19 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:41:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:41:19 PM	Tube furnace set to 0
5/2/2012	9:41:22 PM	H2 valve closed
5/2/2012	9:41:22 PM	BCl3 valve closed
5/2/2012	9:41:22 PM	PH3 valve closed
5/2/2012	9:41:22 PM	SiCl4 pre valve closed
5/2/2012	9:41:22 PM	SiCl4 post valve closed
5/2/2012	9:41:22 PM	Main Vac valve closed
5/2/2012	9:41:22 PM	Bypass valve closed
5/2/2012	9:41:22 PM	Bubbler valve closed
5/2/2012	9:41:22 PM	Helium valve opened
5/2/2012	9:41:22 PM	Helium MFC set to  500.000000
5/2/2012	9:41:22 PM	H2 MFC set to  0.000000
5/2/2012	9:41:22 PM	BCl3 MFC set to  0.000000
5/2/2012	9:41:22 PM	PH3 MFC set to  0.000000
5/2/2012	9:41:22 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:41:22 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:41:22 PM	Tube furnace set to 0
5/2/2012	9:42:34 PM	Helium valve closed
5/2/2012	9:42:34 PM	H2 valve closed
5/2/2012	9:42:34 PM	BCl3 valve closed
5/2/2012	9:42:34 PM	PH3 valve closed
5/2/2012	9:42:34 PM	SiCl4 pre valve closed
5/2/2012	9:42:34 PM	SiCl4 post valve closed
5/2/2012	9:42:34 PM	Main Vac valve closed
5/2/2012	9:42:34 PM	Bypass valve closed
5/2/2012	9:42:34 PM	Bubbler valve closed
5/2/2012	9:42:34 PM	Helium MFC set to  0.000000
5/2/2012	9:42:34 PM	H2 MFC set to  0.000000
5/2/2012	9:42:34 PM	BCl3 MFC set to  0.000000
5/2/2012	9:42:34 PM	PH3 MFC set to  0.000000
5/2/2012	9:42:34 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:42:34 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:42:34 PM	Tube furnace set to 0
5/2/2012	9:42:35 PM	Run finished at 9:42 PM
5/2/2012	9:42:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/2/2012	9:52:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	9:52:46 PM	Recipe started at 9:52 PM
5/2/2012	9:52:46 PM	Helium valve closed
5/2/2012	9:52:46 PM	H2 valve closed
5/2/2012	9:52:46 PM	BCl3 valve closed
5/2/2012	9:52:46 PM	PH3 valve closed
5/2/2012	9:52:46 PM	SiCl4 pre valve closed
5/2/2012	9:52:46 PM	SiCl4 post valve closed
5/2/2012	9:52:46 PM	Main Vac valve closed
5/2/2012	9:52:46 PM	Bubbler valve closed
5/2/2012	9:52:46 PM	Bypass valve opened
5/2/2012	9:52:46 PM	Helium MFC set to  0.000000
5/2/2012	9:52:46 PM	H2 MFC set to  0.000000
5/2/2012	9:52:46 PM	BCl3 MFC set to  0.000000
5/2/2012	9:52:46 PM	PH3 MFC set to  0.000000
5/2/2012	9:52:46 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:52:46 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:52:46 PM	Tube furnace set to 0
5/2/2012	9:53:57 PM	Helium valve closed
5/2/2012	9:53:57 PM	H2 valve closed
5/2/2012	9:53:57 PM	BCl3 valve closed
5/2/2012	9:53:57 PM	PH3 valve closed
5/2/2012	9:53:57 PM	SiCl4 pre valve closed
5/2/2012	9:53:57 PM	SiCl4 post valve closed
5/2/2012	9:53:57 PM	Main Vac valve closed
5/2/2012	9:53:57 PM	Bubbler valve closed
5/2/2012	9:53:57 PM	Bypass valve opened
5/2/2012	9:53:57 PM	Helium MFC set to  0.000000
5/2/2012	9:53:57 PM	H2 MFC set to  0.000000
5/2/2012	9:53:57 PM	BCl3 MFC set to  0.000000
5/2/2012	9:53:57 PM	PH3 MFC set to  0.000000
5/2/2012	9:53:57 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:53:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:53:57 PM	Tube furnace set to 0
5/2/2012	9:54:57 PM	Helium valve closed
5/2/2012	9:54:57 PM	H2 valve closed
5/2/2012	9:54:57 PM	BCl3 valve closed
5/2/2012	9:54:57 PM	PH3 valve closed
5/2/2012	9:54:57 PM	SiCl4 pre valve closed
5/2/2012	9:54:57 PM	SiCl4 post valve closed
5/2/2012	9:54:57 PM	Bypass valve closed
5/2/2012	9:54:57 PM	Bubbler valve closed
5/2/2012	9:54:57 PM	Main Vac valve opened
5/2/2012	9:54:57 PM	Helium MFC set to  0.000000
5/2/2012	9:54:57 PM	H2 MFC set to  0.000000
5/2/2012	9:54:57 PM	BCl3 MFC set to  0.000000
5/2/2012	9:54:57 PM	PH3 MFC set to  0.000000
5/2/2012	9:54:57 PM	SiCl4 MFC set to  0.000000
5/2/2012	9:54:57 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	9:54:57 PM	Tube furnace set to 0
5/2/2012	9:54:58 PM	Run finished at 9:54 PM
5/2/2012	9:54:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/2/2012	10:12:06 PM	Recipe started at 10:11 PM
5/2/2012	10:12:06 PM	H2 valve closed
5/2/2012	10:12:06 PM	BCl3 valve closed
5/2/2012	10:12:06 PM	PH3 valve closed
5/2/2012	10:12:06 PM	SiCl4 pre valve closed
5/2/2012	10:12:06 PM	SiCl4 post valve closed
5/2/2012	10:12:06 PM	Main Vac valve closed
5/2/2012	10:12:06 PM	Bypass valve closed
5/2/2012	10:12:06 PM	Bubbler valve closed
5/2/2012	10:12:06 PM	Helium valve opened
5/2/2012	10:12:06 PM	Helium MFC set to  500.000000
5/2/2012	10:12:06 PM	H2 MFC set to  0.000000
5/2/2012	10:12:06 PM	BCl3 MFC set to  0.000000
5/2/2012	10:12:06 PM	PH3 MFC set to  0.000000
5/2/2012	10:12:06 PM	SiCl4 MFC set to  0.000000
5/2/2012	10:12:06 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:12:07 PM	Tube furnace set to 180
5/2/2012	10:13:22 PM	H2 valve closed
5/2/2012	10:13:22 PM	BCl3 valve closed
5/2/2012	10:13:22 PM	PH3 valve closed
5/2/2012	10:13:22 PM	SiCl4 pre valve closed
5/2/2012	10:13:22 PM	SiCl4 post valve closed
5/2/2012	10:13:22 PM	Main Vac valve closed
5/2/2012	10:13:22 PM	Bypass valve closed
5/2/2012	10:13:22 PM	Helium valve opened
5/2/2012	10:13:22 PM	Bubbler valve opened
5/2/2012	10:13:22 PM	Helium MFC set to  500.000000
5/2/2012	10:13:22 PM	H2 MFC set to  0.000000
5/2/2012	10:13:22 PM	BCl3 MFC set to  0.000000
5/2/2012	10:13:22 PM	PH3 MFC set to  0.000000
5/2/2012	10:13:22 PM	SiCl4 MFC set to  0.000000
5/2/2012	10:13:22 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:13:23 PM	Tube furnace set to 180
5/2/2012	10:14:23 PM	Helium valve closed
5/2/2012	10:14:23 PM	H2 valve closed
5/2/2012	10:14:23 PM	BCl3 valve closed
5/2/2012	10:14:23 PM	PH3 valve closed
5/2/2012	10:14:23 PM	SiCl4 pre valve closed
5/2/2012	10:14:23 PM	SiCl4 post valve closed
5/2/2012	10:14:23 PM	Main Vac valve closed
5/2/2012	10:14:23 PM	Bubbler valve closed
5/2/2012	10:14:23 PM	Bypass valve opened
5/2/2012	10:14:23 PM	Helium MFC set to  0.000000
5/2/2012	10:14:23 PM	H2 MFC set to  0.000000
5/2/2012	10:14:23 PM	BCl3 MFC set to  0.000000
5/2/2012	10:14:23 PM	PH3 MFC set to  0.000000
5/2/2012	10:14:23 PM	SiCl4 MFC set to  0.000000
5/2/2012	10:14:23 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:14:23 PM	Tube furnace set to 180
5/2/2012	10:15:18 PM	Helium valve closed
5/2/2012	10:15:18 PM	H2 valve closed
5/2/2012	10:15:18 PM	BCl3 valve closed
5/2/2012	10:15:18 PM	PH3 valve closed
5/2/2012	10:15:18 PM	SiCl4 pre valve closed
5/2/2012	10:15:18 PM	SiCl4 post valve closed
5/2/2012	10:15:18 PM	Main Vac valve closed
5/2/2012	10:15:18 PM	Bubbler valve closed
5/2/2012	10:15:18 PM	Bypass valve opened
5/2/2012	10:15:18 PM	Helium MFC set to  0.000000
5/2/2012	10:15:18 PM	H2 MFC set to  0.000000
5/2/2012	10:15:18 PM	BCl3 MFC set to  0.000000
5/2/2012	10:15:18 PM	PH3 MFC set to  0.000000
5/2/2012	10:15:18 PM	SiCl4 MFC set to  0.000000
5/2/2012	10:15:18 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:15:19 PM	Tube furnace set to 180
5/2/2012	10:16:19 PM	Helium valve closed
5/2/2012	10:16:19 PM	H2 valve closed
5/2/2012	10:16:19 PM	BCl3 valve closed
5/2/2012	10:16:19 PM	PH3 valve closed
5/2/2012	10:16:19 PM	SiCl4 pre valve closed
5/2/2012	10:16:19 PM	SiCl4 post valve closed
5/2/2012	10:16:19 PM	Bypass valve closed
5/2/2012	10:16:19 PM	Bubbler valve closed
5/2/2012	10:16:19 PM	Main Vac valve opened
5/2/2012	10:16:19 PM	Helium MFC set to  0.000000
5/2/2012	10:16:19 PM	H2 MFC set to  0.000000
5/2/2012	10:16:19 PM	BCl3 MFC set to  0.000000
5/2/2012	10:16:19 PM	PH3 MFC set to  0.000000
5/2/2012	10:16:19 PM	SiCl4 MFC set to  0.000000
5/2/2012	10:16:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	10:16:19 PM	Tube furnace set to 180
5/2/2012	11:46:19 PM	H2 valve closed
5/2/2012	11:46:19 PM	BCl3 valve closed
5/2/2012	11:46:19 PM	PH3 valve closed
5/2/2012	11:46:19 PM	SiCl4 pre valve closed
5/2/2012	11:46:19 PM	SiCl4 post valve closed
5/2/2012	11:46:19 PM	Bypass valve closed
5/2/2012	11:46:19 PM	Bubbler valve closed
5/2/2012	11:46:19 PM	Helium valve opened
5/2/2012	11:46:19 PM	Main Vac valve opened
5/2/2012	11:46:19 PM	Helium MFC set to  10.000000
5/2/2012	11:46:19 PM	H2 MFC set to  0.000000
5/2/2012	11:46:19 PM	BCl3 MFC set to  0.000000
5/2/2012	11:46:19 PM	PH3 MFC set to  0.000000
5/2/2012	11:46:19 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:46:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:46:19 PM	Tube furnace set to 180
5/2/2012	11:46:49 PM	Helium valve closed
5/2/2012	11:46:49 PM	H2 valve closed
5/2/2012	11:46:49 PM	BCl3 valve closed
5/2/2012	11:46:49 PM	PH3 valve closed
5/2/2012	11:46:49 PM	SiCl4 pre valve closed
5/2/2012	11:46:49 PM	SiCl4 post valve closed
5/2/2012	11:46:49 PM	Bypass valve closed
5/2/2012	11:46:49 PM	Bubbler valve closed
5/2/2012	11:46:49 PM	Main Vac valve opened
5/2/2012	11:46:49 PM	Helium MFC set to  0.000000
5/2/2012	11:46:49 PM	H2 MFC set to  0.000000
5/2/2012	11:46:49 PM	BCl3 MFC set to  0.000000
5/2/2012	11:46:49 PM	PH3 MFC set to  0.000000
5/2/2012	11:46:49 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:46:49 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:46:49 PM	Tube furnace set to 180
5/2/2012	11:47:19 PM	H2 valve closed
5/2/2012	11:47:19 PM	BCl3 valve closed
5/2/2012	11:47:19 PM	PH3 valve closed
5/2/2012	11:47:19 PM	SiCl4 pre valve closed
5/2/2012	11:47:19 PM	SiCl4 post valve closed
5/2/2012	11:47:19 PM	Bypass valve closed
5/2/2012	11:47:19 PM	Bubbler valve closed
5/2/2012	11:47:19 PM	Helium valve opened
5/2/2012	11:47:19 PM	Main Vac valve opened
5/2/2012	11:47:19 PM	Helium MFC set to  10.000000
5/2/2012	11:47:19 PM	H2 MFC set to  0.000000
5/2/2012	11:47:19 PM	BCl3 MFC set to  0.000000
5/2/2012	11:47:19 PM	PH3 MFC set to  0.000000
5/2/2012	11:47:19 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:47:19 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:47:20 PM	Tube furnace set to 180
5/2/2012	11:47:50 PM	Helium valve closed
5/2/2012	11:47:50 PM	H2 valve closed
5/2/2012	11:47:50 PM	BCl3 valve closed
5/2/2012	11:47:50 PM	PH3 valve closed
5/2/2012	11:47:50 PM	SiCl4 pre valve closed
5/2/2012	11:47:50 PM	SiCl4 post valve closed
5/2/2012	11:47:50 PM	Bypass valve closed
5/2/2012	11:47:50 PM	Bubbler valve closed
5/2/2012	11:47:50 PM	Main Vac valve opened
5/2/2012	11:47:50 PM	Helium MFC set to  0.000000
5/2/2012	11:47:50 PM	H2 MFC set to  0.000000
5/2/2012	11:47:50 PM	BCl3 MFC set to  0.000000
5/2/2012	11:47:50 PM	PH3 MFC set to  0.000000
5/2/2012	11:47:50 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:47:50 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:47:50 PM	Tube furnace set to 180
5/2/2012	11:49:50 PM	Helium valve closed
5/2/2012	11:49:50 PM	BCl3 valve closed
5/2/2012	11:49:50 PM	PH3 valve closed
5/2/2012	11:49:50 PM	SiCl4 pre valve closed
5/2/2012	11:49:50 PM	SiCl4 post valve closed
5/2/2012	11:49:50 PM	Main Vac valve closed
5/2/2012	11:49:50 PM	Bypass valve closed
5/2/2012	11:49:50 PM	Bubbler valve closed
5/2/2012	11:49:50 PM	H2 valve opened
5/2/2012	11:49:50 PM	Helium MFC set to  0.000000
5/2/2012	11:49:50 PM	H2 MFC set to  500.000000
5/2/2012	11:49:50 PM	BCl3 MFC set to  0.000000
5/2/2012	11:49:50 PM	PH3 MFC set to  0.000000
5/2/2012	11:49:50 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:49:50 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:49:50 PM	Tube furnace set to 1000
5/2/2012	11:51:02 PM	Helium valve closed
5/2/2012	11:51:02 PM	BCl3 valve closed
5/2/2012	11:51:02 PM	PH3 valve closed
5/2/2012	11:51:02 PM	SiCl4 pre valve closed
5/2/2012	11:51:02 PM	SiCl4 post valve closed
5/2/2012	11:51:02 PM	Main Vac valve closed
5/2/2012	11:51:02 PM	Bypass valve closed
5/2/2012	11:51:02 PM	H2 valve opened
5/2/2012	11:51:02 PM	Bubbler valve opened
5/2/2012	11:51:02 PM	Helium MFC set to  0.000000
5/2/2012	11:51:02 PM	H2 MFC set to  500.000000
5/2/2012	11:51:02 PM	BCl3 MFC set to  0.000000
5/2/2012	11:51:02 PM	PH3 MFC set to  0.000000
5/2/2012	11:51:02 PM	SiCl4 MFC set to  0.000000
5/2/2012	11:51:02 PM	Bypass solenoid MFC set to  0.000000
5/2/2012	11:51:02 PM	Tube furnace set to 1000
